TY  - BOOK
T1  - Silicon processing for the VLSI era
A1  - Wolf, Stanley 1943-
A2  - Tauber, Richard N.
LA  - English
PP  - Sunset Beach, Calif.
PB  - Lattice Press
YR  - 1986
UL  - https://ds.mainlib.upd.edu.ph/Record/UP-99796217609855876
CN  - TK 7874 W635 1986
KW  - Semiconductors : Etching.
KW  - Integrated circuits : Very large scale integration.
KW  - Silicon.
ER  -