TY  - GEN
T1  - SIMOX
A2  - Anc, Maria J.
LA  - English
PP  - London, United Kingdom
PB  - Institution of Engineering and Technology
YR  - 2004
UL  - https://ds.mainlib.upd.edu.ph/Record/UP-99796217612476904
AB  - SIMOX explores Separation-by-implanted-oxygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The book consists of sequence of chapters, each written by a key of contributor to the field and represents the first effort to compile broad knowledge of this still evolving technology. It provides the reader with a basic understanding of SIMOX technology and a background for further investigations and applications.
SN  - 9781849190640 (e-ISBN)
KW  - Silicon-on-insulator technology.
KW  - Electronic books.
ER  -