SIMOX
SIMOX explores Separation-by-implanted-oxygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The book consists of sequence of chapters, each written by a key of contributor to the field and represe...
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| Natura: | Electronic Resource |
| Lingua: | inglese |
| Pubblicazione: |
London, United Kingdom
Institution of Engineering and Technology
2004.
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| Accesso online: | Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy |