SIMOX

SIMOX explores Separation-by-implanted-oxygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The book consists of sequence of chapters, each written by a key of contributor to the field and represe...

Full description

Bibliographic Details
Other Authors:	Anc, Maria J. (Editor)
Format:	Electronic Resource
Language:	English
Published:	London, United Kingdom Institution of Engineering and Technology 2004.
Subjects:	Silicon-on-insulator technology. Electronic books.
Online Access:	Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy