Design, modeling and control of nanopositioning systems

Design, modeling and control of nanopositioning systems

Bibliographic Details
Main Authors: Fleming, Andrew J. 1977- (Author), Leang, Kam K. (Author)
Format: Electronic Resource
Language:English
Published: Cham [Switzerland] Springer [2014]
Subjects:
Nanotechnology.
Nanoelectromechanical systems.
Electronic books.
Online Access:Available for University of the Philippines Diliman College of Engineering via Springer. Click here to access