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    Nano and micromachining

    Published 2009
    Book
  4. 4

    Semiconductor micromachining

    Published 1998
    Book
  5. 5

    Handbook of microlithography, micromachining, and microfabrication

    Published 1997
    Book
  6. 6

    Reinventing the factory by Harmon, Roy L., Peterson, Leroy D.

    Published 1990
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