Dry etching technology for semiconductors by Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source by Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 by Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon by Sotto, Romelyn H.

Principles of plasma discharges and materials processing by Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. by D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. by Manos, Dennis M.

Applications of plasma processes to VLSI technology