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    Physical vapor deposition of thin films by Mahan, John E.

    Published 2000
    Book
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    Preparation of thin films by George, Joy 1926-

    Published 1992
    Book
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    Thin films by chemical vapour deposition by Morosanu, C. E.

    Published 1990
    Book
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    Applications of plasma processes to VLSI technology

    Published 1985
    Book

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