Microelectromechanical systems
This book is prepared by the specialists in the field of microelectromechanical systems (MEMS). It consists of two major sections dedicated to BioMEMS Devices, and MEMS characterization and micromachining. The developments of MEMS and devices have been influential in the demonstration of new devices...
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| Format: | Book |
| Language: | English |
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New York, NY, USA
NY Research Press
[2015]
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