Structural characterization of GaN thin film and bulk GaN synthesized in a multi-cusp plasma sputter-type ion source
Thin film and bulk GaN synthesized via the low temperature multi-cusp plasma sputter-type ion source were characterized using various techniques to determine its crystallography and electrical behavior. Field Emission Scanning Electron Microscope (FESEM), Scanning Transmission Electron Microscope (S...
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| Format: | Thesis |
| Language: | English |
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2006.
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