Semiconductor fabrication technology and metrology

Bibliographic Details
Corporate Authors:	ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing
Other Authors:	Gupta, D. C.
Format:	Book
Language:	English
Published:	Philadelphia, PA ASTM c1989.
Series:	ASTM special technical publication 990.
Subjects:	Semiconductors > Design and construction > Congresses.