Silicon processing for the VLSI era

Ngā taipitopito rārangi puna kōrero
Kaituhi matua:	Wolf, Stanley 1943-
Ētahi atu kaituhi:	Tauber, Richard N.
Hōputu:	Pukapuka
Reo:	Ingarihi
I whakaputaina:	Sunset Beach, Calif. Lattice Press c1986.
Ngā marau:	Semiconductors > Etching. Integrated circuits > Very large scale integration. Silicon.