Crystal growth and evaluation of silicon for VLSI and ULSI
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Format: | Electronic Resource |
Language: | English |
Published: |
Boca Raton, FL
CRC Press Taylor & Francis Group
2015.
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Subjects: | |
Online Access: | Available for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access Also available remotely for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access thru EZproxy |