Fabrication of GaAs devices
The following topics are dealt with: semiconductor properties, semiconductor growth, cleaning; passivation; dry etching; ohmic contacts; Schottky contacts; field effect transistors; heterojunction bipolar transistors; wet oxidation; optoelectronic device; and MIS GaAs device.
Main Authors: | , |
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Format: | Electronic Resource |
Language: | English |
Published: |
London, United Kingdom
Institution of Engineering and Technology
2005.
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Subjects: | |
Online Access: | Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy |