Fabrication of GaAs devices

The following topics are dealt with: semiconductor properties, semiconductor growth, cleaning; passivation; dry etching; ohmic contacts; Schottky contacts; field effect transistors; heterojunction bipolar transistors; wet oxidation; optoelectronic device; and MIS GaAs device.

Bibliographic Details
Main Authors: Baca, A. G. (Author), Ashby, Carol Iris Hill 1953- (Author)
Format: Electronic Resource
Language:English
Published: London, United Kingdom Institution of Engineering and Technology 2005.
Subjects:
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