An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications

An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications

Bibliographic Details
Main Author: Lubguban, Arnold A. (Author)
Format: Electronic Resource
Language:English
Published: Ann Arbor Michigan ProQuest Information and Learning Company [2006]
Subjects:
Supercritical fluid extraction.
Carbon dioxide.
Solvent extraction.
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